Temperature compensated resonator with a pair of spaced apart internal dielectric layers
US9431993B1 · kind B1 · utility
3Cited by
7References
25Claims
0Family size
Assignee
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Key dates
| Filing date | Nov 1, 2011 |
| Grant date | Aug 30, 2016 |
| Priority date | — |
| Expiry date | Sep 3, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/2442
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A device includes a substrate, an electrode supported by the substrate, an anchor supported by the substrate, and a composite structure supported by the anchor, disposed adjacent the electrode, and configured for resonant vibration. The composite structure includes an external layer and an internal dielectric region covered by the external layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.