Part inspection apparatus and handler
US9434555B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 12, 2013 |
| Grant date | Sep 6, 2016 |
| Priority date | — |
| Expiry date | Jan 4, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6838
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A handler includes a supply shuttle plate on which a device is placed and cooled, and a transfer robot configured to transfer the device placed on the supply shuttle plate from the supply shuttle plate. The transfer robot includes an adsorbing portion configured to adsorb the device placed on the supply shuttle plate thereon, a vertical movement arm configured to move the adsorbing portion away from the supply shuttle plate, an arm box configured to accommodate the adsorbing portion together with the device in a state of being kept away from the supply shuttle plate, and a dry air supply unit configured to supply dry gas into the arm box.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.