Radical reactor with inverted orientation
US9435030B2 · kind B2 · utility
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1References
16Claims
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Assignee
Inventors
Key dates
| Filing date | Apr 29, 2013 |
| Grant date | Sep 6, 2016 |
| Priority date | — |
| Expiry date | Apr 29, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32568
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A radical reactor including an elongated structure received within a chamber of a body of the radical reactor. Radicals are generated within a radical chamber formed in the elongated structure by applying a voltage signal across the elongated structure and an electrode extending within the radical chamber. The radicals generated in the radical chamber are routed via a discharge port of the elongated structure and a conduit formed in the body of the radical reactor onto the substrate. The discharge port and the conduit are not aligned so that irradiation generated in the radical chamber is not directed to the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.