Production and distribution of dilute species in semiconducting materials

US9437692B2 · kind B2 · utility

Assignee

• Brookhaven Science Associates, LLC · US

Inventors

• Ralph B. James · Ridge, US
• Giuseppe Camarda · Farmingville, US
• Aleksey E. Bolotnikov · South Setauket, US
• Anwar Hossain · Port Jefferson Station, US
• Ge Yang · Beijing, CN
• Kihyun Kim · Hackensack, US

Key dates

• Filing date: Oct 25, 2013
• Grant date: Sep 6, 2016
• Expiry date: Jun 27, 2034

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C30B29/48
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Technologies are described effective to implement systems and methods of producing a material. The methods comprise receiving a tertiary semiconductor sample with a dilute species. The sample has two ends. The first end of the sample includes a first concentration of the dilute species lower than a second concentration of the dilute species in the second end of the sample. The method further comprises heating the sample in a chamber. The chamber has a first zone and a second zone. The first zone having a first temperature higher than a second temperature in the second zone. The sample is orientated such that the first end is in the first zone and the second end is in the second zone.