Apparatus and method for measuring surface topography optically
US9439568B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 3, 2014 |
| Grant date | Sep 13, 2016 |
| Priority date | — |
| Expiry date | Oct 21, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/25
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
An apparatus is described for determining surface topography of a three-dimensional structure. The apparatus can include a probe and an illumination unit configured to output a plurality of light beams. In many embodiments, the apparatus includes a light focusing assembly. The light focusing assembly can receive and focus each of a plurality of light beams to a respective external focal point. The light focusing assembly can be configured to overlap the plurality of light beams within a focus changing assembly in order to move the external focal points along a direction of propagation of the light beams. The apparatus can include a detector having an array of sensing elements configured to measure a characteristic of each of a plurality of light beams returning from the illuminated spots and a processor coupled to the detector and configured to generate data representative of topography of the structure based on the measured characteristic.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.