Pressure difference sensor and method for its manufacture

US9442033B2 · kind B2 · utility

Assignee

• Endress + GmbH + Co. KG · DE

Inventors

• Igor Getman · Lörrach, DE
• Rafael Teipen · Berlin, DE
• Thomas Hamilton Link · Pasadena, US
• Peter Nommensen · Villingen-Schwenningen, DE

Key dates

• Filing date: Sep 24, 2013
• Grant date: Sep 13, 2016
• Expiry date: Sep 24, 2033

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C1/00396
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure difference sensor includes a measuring membrane, which is arranged between two platforms and connected pressure-tightly with the platforms, in each case, via a first insulating layer for forming pressure chambers between the platforms and the measuring membrane. The insulating layer is especially silicon oxide, wherein the pressure difference sensor further includes an electrical transducer for registering a pressure dependent deflection of the measuring membrane. The platforms have support positions, against which the measuring membrane lies at least partially in the case of overload, wherein the support positions have position dependent heights, characterized in that the support positions are formed in the first insulating layer by isotropic etching, and the particular height h of a support position, in each case, is a function of a distance from a base of the support position in the reference plane.