Hydrogen sensor and method of manufacturing the same
US9442099B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 15, 2013 |
| Grant date | Sep 13, 2016 |
| Priority date | — |
| Expiry date | May 28, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of the invention includes preparing a mold having a hydrogen detection part pattern, a nanogap pattern and a base to be formed on a hydrogen sensor substrate; preparing a material to which the patterns are transferrable; forming the hydrogen sensor substrate by bringing the mold into contact with the material to thus transfer the patterns to the material and then detaching the mold from the material to which the patterns are transferred, the hydrogen sensor substrate having a base part corresponding to the base, a plurality of hydrogen detection parts erected from the base part and corresponding to the nanogap pattern and a plurality of nanogaps formed between the hydrogen detection parts and corresponding to the hydrogen detection part pattern; and forming, on the hydrogen sensor substrate, a thin film of a transition metal or an alloy thereof to be expanded by hydrogen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.