Alignment support device and alignment support method for probe device
US9442156B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 24, 2015 |
| Grant date | Sep 13, 2016 |
| Priority date | — |
| Expiry date | Aug 24, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2891
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides a probe device that includes an alignment utility function. When a user inputs a condition value for a variation amount (variation range) of a contact position at which a probe is in contact with each chip, in a simulation using actual measurement data acquired by measuring a position of each of all chips in one wafer, a range of variation of each chip is calculated by changing a measurement point at which alignment is performed to calculate a setting of optimum measurement points so that the range of variation is equal to or less than the condition value and the number of measurement points is minimum. Then information on the optimum measurement point is provided to the user.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.