Apparatus for generating a hollow cathode arc discharge plasma

US9443703B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Henry Morgner · Dresden, DE
• Gösta Mattausch · Dresden, DE
• Christoph Metzner · Dresden, DE
• Michael Junghähnel · Dresden, DE
• Rainer Labitzke · Dresden, DE
• Lars Klose · Hanerau-Hademarschen, DE
• Torsten Werner · Dresden, DE
• Jörg Kubusch · Dresden, DE

Key dates

• Filing date: Oct 17, 2012
• Grant date: Sep 13, 2016
• Expiry date: Oct 17, 2032

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/327
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

An apparatus for generating a hollow cathode arc discharge plasma, including two plasma sources, each including a hollow cathode and an electrode which is associated with the hollow cathode and which has an opening that extends through the electrode, wherein the hollow cathodes of the two plasma sources are connected to a pulse generator which generates a bipolar, medium-frequency pulsed voltage between the two hollow cathodes. Here, in each of the two plasma sources, the hollow cathode is connected in an electrically conducting manner, directly or with interconnection of at least one current direction limiting component, to the associated electrode.