Substrate transfer robot, substrate transfer system, and method for transferring substrate
US9446910B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 22, 2014 |
| Grant date | Sep 20, 2016 |
| Priority date | — |
| Expiry date | Dec 23, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S901/02
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A substrate transfer robot includes a hand to approach a substrate storage on which a substrate is placed, and to hold the substrate. An arm moves the hand. A controller controls a position and orientation of the hand. When in plan view, a substrate holding center at a time when the hand is holding the substrate is adjacent to the substrate storage and is at an access start position at a predetermined distance from the substrate storage, the substrate holding center reaches a substrate placement position in the substrate storage with a hand center line inclined toward an access straight line and with the hand holding center overlapping the access straight line. The hand center line is oriented from a base to a distal end of the hand. The access straight line is perpendicular to a front surface of the substrate storage and associated with the hand approaching the substrate storage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.