Patent · US Active

Method for the fabrication of thin-film transistors together with other components on a substrate

US9446946B2 · kind B2 · utility

1Cited by

0References

11Claims

0Family size

Assignee

UNIVERSITAT STUTTGART · DE

Inventors

Patrick Schalberger · Magstadt, DE
Norbert Fruehauf · Sindelfingen, DE
Marcus Herrmann · Neuffen, DE

Key dates

Filing date	Sep 23, 2015
Grant date	Sep 20, 2016
Priority date	—
Expiry date	Sep 23, 2035

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/0742
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A method for the fabrication of thin-film transistors together with micromechanical components, other active electrical components or both on an amorphous or polycrystalline substrate includes disposing the thin-film transistors and the other components on different areas of the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.