Microfluidic pressure amplifier circuits and electrostatic gates for pneumatic microsystems
US9447895B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | May 23, 2013 |
| Grant date | Sep 20, 2016 |
| Priority date | — |
| Expiry date | May 6, 2034 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K2099/0084
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An electrostatic actuator is provide that can include a fluidic line, a first electrode, and a second electrode such that a gate chamber portion of the fluidic line is sandwiched between the first electrode and the second electrode. The electrostatic actuator can also include a pressure-balancing channel in fluid communication with the gate chamber portion where the first electrode is sandwiched between the pressure-balancing channel and the gate chamber portion. A pneumatic valve system is provided which includes an electrostatic gate and a fluidic channel fluidly separate from a fluidic control line. A pneumatic valve portion of the fluidic control line can be positioned relative to a portion of the fluidic channel such that expansion of the pneumatic valve portion restricts fluid flow through the fluidic channel. Methods of using an electrostatic actuator and a pneumatic valve system are also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.