Impedance matching device, linear motion module, and radio frequency power supply device
US9450559B2 · kind B2 · utility
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4References
4Claims
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Key dates
| Filing date | Jun 12, 2015 |
| Grant date | Sep 20, 2016 |
| Priority date | — |
| Expiry date | Jun 12, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H2242/26
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An impedance matching device includes a first variable capacitor connected to an RF power source and including a first shaft moving linearly, a first linear motion unit axially coupled to the first shaft of the first variable capacitor to provide linear motion, a first insulating joint connecting the first shaft to a first driving shaft of the first linear motion unit, and a first displacement sensor adapted to measure a movement distance of the first driving shaft of the first linear motion unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.