Patent · US Active

Sensor structure and yaw rate sensor

US9453927B2 · kind B2 · utility

4Cited by

0References

10Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Markus Heitz · Tübingen, DE
Christoph Gauger · Balingen, DE
Sebastian Gracki · Reutlingen, DE
Patrick Wellner · Neckartenzlingen, DE

Key dates

Filing date	Dec 28, 2012
Grant date	Sep 27, 2016
Priority date	—
Expiry date	Oct 9, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01C19/5747
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A sensor structure includes a substrate having a main extension plane, a first seismic mass and a second seismic mass, the first and the second seismic masses being deflectable relative to the substrate along a direction of deflection essentially perpendicular to the main extension plane. The first and second seismic masses are coupled together via a rigid coupling rocker pivotable around a rocker axis parallel to the main extension plane. The first seismic mass is suspended from the substrate with the aid of a first suspension spring, and an essentially rigid first coupling bar is situated between the first suspension spring and the first seismic mass.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.