Piezoelectric piece for piezoelectric vibrator and manufacturing method thereof
US9455683B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 17, 2013 |
| Grant date | Sep 27, 2016 |
| Priority date | — |
| Expiry date | May 14, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
The present invention presents a piezoelectric piece for a piezoelectric vibrator and a manufacturing method thereof. The piezoelectric piece for a piezoelectric vibrator in accordance with an embodiment of the present invention includes: a base; and a vibrating arm connected to the base and having a groove formed therein. Here, one surface inside the groove includes: a first slope extended from an upper portion of the groove in a lower direction so as to have a first angle; and a second slope extended from a lower portion of the first slope in a lower direction so as to have a second angle that is greater than the first angle, and a rate of a depth of the first slope for a depth of the groove is greater than or equal to 0.5 and less than or equal to 1.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.