Pressure sensor and method for its manufacture

US9459169B2 · kind B2 · utility

Assignee

• ENDRESS+HAUSER GMBH+CO.KG · DE

Inventors

• Peter Selders · Maulburg, DE
• Andreas Rossberg · Bad Säckingen, DE
• Elke Schmidt · Bad Säckingen, DE
• Andrea Berlinger · Baden-Baden, DE

Key dates

• Filing date: Nov 23, 2011
• Grant date: Oct 4, 2016
• Expiry date: Mar 9, 2032

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/0075
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for manufacturing a pressure sensor, comprising: providing a ceramic platform, a ceramic measuring membrane, and an intermediate ring; providing an active braze material by means of gas phase deposition at least on a first surface section of a first surface and on a second surface section of a second surface. The first surface is a platform surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the platform by means of the active hard solder, or braze. The second surface is a measuring membrane surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the measuring membrane by means of the active hard solder, or braze. The intermediate ring is positioned between the measuring membrane and the platform; the active hard solder, or braze, is heated in a soldering, or brazing, process, wherein the intermediate ring remains essentially solid during the soldering, or brazing, process.