MOEMS apparatus and a method for manufacturing same
US9459447B2 · kind B2 · utility
0Cited by
3References
15Claims
0Family size
Assignee
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Key dates
| Filing date | Feb 6, 2014 |
| Grant date | Oct 4, 2016 |
| Priority date | — |
| Expiry date | Jun 25, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N1/008
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus is formed from a double active layer silicon on insulator (DSOI) substrate that includes first and second active layers separated by an insulating layer. An electrostatic comb drive is formed from the substrate to include a first comb formed from the first active layer and a second comb formed from the second active layer. The comb drive may be used to impart a tilting motion to a micro-mirror. The method of manufacturing provides comb teeth exhibiting an aspect ratio greater than 1:20, with an offset distance between comb teeth of the first and second combs that is less than about 6 μm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.