Vibrator element, vibrator, oscillator, electronic apparatus, and moving object
US9461615B2 · kind B2 · utility
1Cited by
3References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 14, 2014 |
| Grant date | Oct 4, 2016 |
| Priority date | — |
| Expiry date | Jul 14, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/878
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A vibrator element includes a base portion, a vibrating arm extending from the base portion, a first electrode provided on the vibrating arm, a second electrode provided above the first electrode, a piezoelectric body arranged between the first electrode and the second electrode, and an insulating film arranged between the first electrode and the piezoelectric body, in which the material of the first electrode contains TiN, the material of the insulating film contains SiO2, and the material of the piezoelectric body contains AlN.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.