Method for making a patterned perpendicular magnetic recording disk using glancing angle deposition of hard mask material
US9464348B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 26, 2014 |
| Grant date | Oct 11, 2016 |
| Priority date | — |
| Expiry date | Apr 24, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/855
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for making a bit-patterned media (BPM) magnetic recording disk by etching the recording layer using a patterned hard mask layer uses glancing angle deposition (GLAD) of additional hard mask material as a capping layer onto the tops of the patterned hard mask pillars while the disk is rotated about an axis orthogonal to the plane of the disk. In one embodiment the capping layer is deposited after the pillars have been only partially eroded during a partial ion-milling of the recording layer. Ion-milling is then again performed to remove the remaining recording layer material. In another embodiment, before ion-milling of the recording layer, the capping layer is deposited onto the tops of the un-eroded hard mask pillars. This increases the lateral dimension of the hard mask pillars so that after ion-milling of the recording layer, the magnetic islands have an increased lateral dimension.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.