Sensor device for sensing a gas, method for operating a sensor device for sensing a gas and production method for a sensor device for sensing a gas
US9465004B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 18, 2014 |
| Grant date | Oct 11, 2016 |
| Priority date | — |
| Expiry date | Oct 1, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/407
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor device for sensing a gas includes a sensing region, and a readout region that is electrically and mechanically connected to the sensing region by way of a connecting web. The readout region, the sensing region, and the connecting web are formed from a substrate, and are isolated from the substrate by a clearance cutout. The sensing region has an ion-conducting region configured to provide a measuring signal dependent on the gas. The readout region (is configured to read out the measuring signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.