Roll-to-roll digital photolithography
US9465304B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 27, 2013 |
| Grant date | Oct 11, 2016 |
| Priority date | — |
| Expiry date | Apr 11, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K2203/166
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A system for making flexible circuit films includes an inelastic conveyor, a web handling apparatus configured to pass a flexible substrate around the inelastic conveyor, an image acquisition apparatus configured to measure positions of a first set of alignment marks on the flexible substrate at a first conveyor location, an exposure apparatus configured to patternwise expose a photosensitive material on the flexible substrate at a second conveyor location, and an image processor configured to receive the measured positions of the first set of alignment marks, and to compare the measured positions with reference positions of the first set of alignment marks. The exposure apparatus is configured to patternwise expose the photosensitive material based on the comparison between the measured positions and the reference positions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.