Semiconductor device with multilayer contact and method of manufacturing the same
US9466688B2 · kind B2 · utility
0Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 4, 2016 |
| Grant date | Oct 11, 2016 |
| Priority date | — |
| Expiry date | Apr 4, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/231
Abstract
The present invention provides a semiconductor with a multilayered contact structure. The multilayered structure includes a metal contact placed on an active region of a semiconductor and a metal contact extension placed on the metal contact.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.