Apparatus for producing trichlorosilane
US9468042B2 · kind B2 · utility
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5References
5Claims
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Assignee
Inventors
Key dates
| Filing date | Mar 7, 2011 |
| Grant date | Oct 11, 2016 |
| Priority date | — |
| Expiry date | Mar 7, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/00135
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus for producing trichlorosilane from raw gas containing silicon tetrachloride and hydrogen, having: a reaction chamber being supplied with the raw gas for generating reacted gas containing trichlorosilane and hydrogen; a plurality of heaters heating the raw gas and having exothermic portions being disposed along a vertical direction in the reaction chamber; a plurality of electrodes being connected to basal portions of the heaters; and a radiation plate being disposed between the exothermic portions of the heaters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.