In-situ heated deposition of parylene to enhance pore penetration into silicone
US9469778B2 · kind B2 · utility
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17Claims
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Key dates
| Filing date | Oct 8, 2014 |
| Grant date | Oct 18, 2016 |
| Priority date | — |
| Expiry date | Oct 8, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/249958
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
Coating porous material, such as PDMS, with parylene N, C, D, and AF-4 by vapor deposition polymerization is described in which a temperature of the porous material's surface being coated is heated to between 60° C. and 120° C., or 80° C. and 85° C., during deposition. The parylene forms nano roots within the porous material that connect with a conformal surface coating of parylene. In some embodiments, a watertight separation chamber in an integrated microfluidic liquid chromatography device is fabricated by heating tunnels in micro-fabricated PDMS and depositing parylene within the heated tunnels.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.