Accelerometers
US9470527B2 · kind B2 · utility
0Cited by
4References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 11, 2013 |
| Grant date | Oct 18, 2016 |
| Priority date | — |
| Expiry date | Jun 12, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention provides for an accelerometer comprising a proof mass within a fixed substrate wherein the proof mass is connected to the substrate by one or more v-beams. Acceleration is determined by measuring the deflection of the v-beam or beams.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.