Patent · US Active

Probe head

US9470715B2 · kind B2 · utility

3Cited by

22References

20Claims

0Family size

Assignee

MPI CORPORATION · TW

Inventors

Horng-Kuang Fan · Taipei, TW
Hsien-Ta HSU · Hengshan, TW

Key dates

Filing date	Jan 8, 2014
Grant date	Oct 18, 2016
Priority date	—
Expiry date	Mar 20, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/06722
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe head includes a plate, a probe, and at least one composite coating layer. The plate has at least one through hole therein. The probe is at least partially disposed in the through hole of the plate. The composite coating layer includes a metal layer and a plurality of lubricating particles. The metal layer is disposed in the through hole of the plate and between the plate and the probe. The lubricating particles are dispersed in the metal layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.