Testing semiconductor devices
US9470719B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 14, 2014 |
| Grant date | Oct 18, 2016 |
| Priority date | — |
| Expiry date | May 19, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2601
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus includes a plurality of semiconductor devices and an electrical input device for applying voltage to the plurality of semiconductor devices. There is a switching array configured to sequentially interconnect the electrical input device to each of the semiconductor devices and disconnect the other semiconductor devices from the electrical input device. The semiconductor device connected to the electrical input device is a device under test that produces a test current and the other semiconductor devices are devices not under test that produce, in the aggregate, a leakage current. There is an output node interconnected to the switching array for enabling the measurement of the test current at the output node. There is also a leakage current compensator connected to the output node and the switching array that is configured to divert the leakage current away from the output node.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.