All around contact device and method of making the same

US9472634B2 · kind B2 · utility

Assignee

• NORTHROP GRUMMAN SYSTEMS CORPORATION · US

Inventors

• Eric J. Stewart · Silver Spring, US
• Howell George Henry · Ellicott City, US
• Robert S. Howell · Silver Spring, US
• Matthew Russell King · Wake Forest, US
• Justin Andrew Parke · Ellicott City, US
• Bettina Nechay · Laurel, US
• Harlan Carl Cramer · Columbia, US
• Ronald G. Freitag · Ellicott City, US
• Karen Marie Renaldo · Pasadena, US

Key dates

• Filing date: Mar 9, 2016
• Grant date: Oct 18, 2016
• Expiry date: Mar 9, 2036

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D62/8503

Abstract

A device is provided that comprises a first pillar disposed in a first region and overlying a base structure, and a second pillar disposed in a second region and overlying the base structure and being spaced apart from the first pillar by a device region. A bridge is disposed in the device region with a first end connected to the first pillar and a second end connected to the second pillar. The bridge includes a top, sides, and a bottom. The bridge is formed from one or more heterostructures with an undercut opening extending from the bottom to an underlying structure. A four-sided conductive contact wraps around and substantially surrounds the bridge around its top, its sides, and its bottom along at least a portion of its length between the first and second end.