Resonant sensor and an associated sensing method
US9474157B2 · kind B2 · utility
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30Claims
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Key dates
| Filing date | Jun 29, 2012 |
| Grant date | Oct 18, 2016 |
| Priority date | — |
| Expiry date | May 4, 2035 |
Classification
- Technology area (CPC —)General
Abstract
A sensing system includes an inductor-capacitor-resistor (LCR) resonator sensor having a substrate, a plurality of first sensing elements mutually spaced apart and disposed on the substrate, and a sensing material film being disposed on a first sensing region of the corresponding first sensing element.
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