Device for cleaning fixed abrasives polishing pad
US9475170B2 · kind B2 · utility
0Cited by
4References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 20, 2014 |
| Grant date | Oct 25, 2016 |
| Priority date | — |
| Expiry date | Nov 20, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/245
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A device for cleaning a fixed abrasive polishing pad includes a main body having a surface facing the polishing pad, an inlet coupled to an end of the main body and configured to supply a cleaning liquid, an inject orifice coupled to the inlet for injecting the cleaning liquid and being provided on the surface of the main body, an outlet coupled to the end of the main body, and a recycle orifice coupled to the outlet, and being provided on the surface of the main body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.