Miniaturized sensor comprising a heating element, and associated production method
US9476746B2 · kind B2 · utility
1Cited by
15References
23Claims
0Family size
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Key dates
| Filing date | Jul 12, 2012 |
| Grant date | Oct 25, 2016 |
| Priority date | — |
| Expiry date | Mar 4, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0109
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a miniaturized sensor having a heating element, and to an associated production method. The sensor includes a substrate, a cavity and a heat-insulating structure suspended above the cavity by areas connecting to the substrate. The heat-insulating structure includes at least two bridges extending above the cavity, the heating element being supported by said bridges, extending transversely thereto.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.