Plasma block for remote plasma source
US9478398B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Aug 15, 2014 |
| Grant date | Oct 25, 2016 |
| Priority date | — |
| Expiry date | Aug 15, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32862
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Provided is plasma block for a remote plasma source, and more particularly, is a plasma block that induces plasma to be generated and to flow between a remote plasma source and a vacuum chamber during a cleaning process performed on the vacuum chamber by the remote plasma source. The plasma block includes an external connection path and an internal connection path, which are formed as two sub-blocks connected to each other are combined, wherein the internal connection path includes a linear extending portion that extends in a straight line along a length direction of the internal connection path, and a curve extending portion that extends in a curve to form a curved surface based on a location where the internal connection path and the external connection path contact each other, wherein the curve extending portion has a spherical surface of a complex spherical surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.