Process and apparatus for conversion of silicon tetrachloride to trichlorosilane

US9480959B2 · kind B2 · utility

Assignee

• Wacker Chemie AG · DE

Inventors

• Robert Ring · Haiming, DE
• Noemi Banos · Nuremberg, DE
• Uwe Paetzold · Burghausen, DE

Key dates

• Filing date: Jan 16, 2012
• Grant date: Nov 1, 2016
• Expiry date: Mar 15, 2033

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P20/129
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

A process for hydrogenating chlorosilanes in a reactor, wherein at least two reactant gas streams are introduced separately from one another into a reaction zone, wherein the first reactant gas stream comprising silicon tetrachloride is conducted via a first heat exchanger unit in which it is heated and is then conducted through a heating unit which heats it to a first temperature before the first reactant gas stream reaches the reaction zone, and wherein the second reactant gas stream comprising hydrogen is heated by a second heat exchanger unit to a second temperature, wherein the first temperature is greater than the second temperature, and then introduced into the reaction zone, such that the mixing temperature of the two reactant gas streams in the reaction zone is between 850° C. and 1300° C., and said reactant gas streams react to give product gases comprising trichlorosilane and hydrogen chloride, wherein the product gases obtained in the reaction are conducted through said at least two heat exchanger units and preheat the reactant gas streams of the reaction by the countercurrent principle, wherein the flow passes first through the first heat exchanger unit and then throug…