Spectroscopic measurement device having transmissive optical member with a sloped face
US9482576B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 25, 2015 |
| Grant date | Nov 1, 2016 |
| Priority date | — |
| Expiry date | Mar 25, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/2803
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A spectroscopic measurement device includes: a dividing optical system for dividing a measurement beam emitted from each of a plurality of measurement points located within a measurement area of an object to be measured, into a first measurement beam and a second measurement beam; an imaging optical system; an optical path length difference providing means; a detector including a plurality of pixels; a processor for acquiring an interferogram of a measurement point of the object to be measured; a conjugate plane imaging optical system located between the object to be measured and the dividing optical system; and a periodicity providing means located on the conjugate plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.