Apparatus for inspecting
US9482624B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 29, 2014 |
| Grant date | Nov 1, 2016 |
| Priority date | — |
| Expiry date | Oct 29, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/061
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to an inspection apparatus, the inspection apparatus including a projection unit configured to project a plurality of lights, each having a different focal length relative to a surface of an inspection object, and an inspection unit configured to inspect a surface of an inspection object using the light reflected from the inspection object, wherein the projection unit is provided with a plurality of lenses configured to project the lights, and curvature of each lens is different, and the focal length is different due to the difference of the curvature, whereby the curve on a surface of the inspection object can be reliably measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.