Temperature controller for semiconductor manufacturing equipment, method for calculating PID constants in semiconductor manufacturing, and method for operating temperature controller for semiconductor manufacturing equipment
US9484231B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 18, 2013 |
| Grant date | Nov 1, 2016 |
| Priority date | — |
| Expiry date | Oct 10, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67248
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A temperature adjustment system configured to adjust the temperature of a fluid used in a semiconductor manufacturing apparatus includes: a heat exchanger including therein a temperature adjuster for heating and cooling the fluid, the heat exchanger being configured to perform heat exchange between the fluid therein and the temperature adjuster; a temperature sensor configured to measure the temperature of the fluid; a PID-constant calculator configured to calculate PID constants for PID control based on the physical properties of the fluid and a time constant of the temperature sensor; and a PID-control calculator configured to perform the PID control on the temperature adjuster with the PID constants calculated by the PID-constant calculator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.