Coatings for relatively movable surfaces
US9487397B2 · kind B2 · utility
0Cited by
6References
15Claims
0Family size
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Key dates
| Filing date | Sep 3, 2015 |
| Grant date | Nov 8, 2016 |
| Priority date | — |
| Expiry date | Sep 3, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S257/914
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A device has a microelectromechanical system (MEMS) component with at least one surface and a coating disposed on at least a portion of the surface. The coating has a compound of the formula M(CnF2n+1Or), wherein M is a polar head group and wherein n≧2r. The value of n may range from 2 to about 20, and the value of r may range from 1 to about 10. The value of n plus r may range from 3 to about 30, and a ratio of n:r may have a value of about 2:1 to about 20:1.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.