Patent · US Active

Spectroscopic measurement device having diffraction grating at conjugate plane of relay lens

US9488524B2 · kind B2 · utility

0Cited by
3References
16Claims
0Family size

Assignee

Inventor

Key dates

Filing dateOct 2, 2013
Grant dateNov 8, 2016
Priority date—
Expiry dateOct 2, 2033

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2021/3595
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A spectroscopic measurement device includes: a dividing optical system for dividing a measurement beam emitted from each of a plurality of measurement points located within a measurement area of an object to be measured, into a first measurement beam and a second measurement beam; an imaging optical system; an optical path length difference providing means; a detector including a plurality of pixels; a processor for acquiring an interferogram of a measurement point of the object to be measured; a conjugate plane imaging optical system located between the object to be measured and the dividing optical system; and a periodicity providing means located on the conjugate plane.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.