Patent · US Active

Self test of MEMS accelerometer with ASICS integrated capacitors

US9488693B2 · kind B2 · utility

4Cited by

108References

18Claims

0Family size

Assignee

FAIRCHILD SEMICONDUCTOR CORPORATION · US

Inventors

Jonathan A. Kleks · San Fernando, US
Ion Opris · San Jose, US
Justin Seng · San Jose, US

Key dates

Filing date	Jan 16, 2013
Grant date	Nov 8, 2016
Priority date	—
Expiry date	Jun 9, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2223/00
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An apparatus comprises a micro-electromechanical system (MEMS) sensor including a first capacitive element and a second capacitive element and an integrated circuit (IC). The IC includes a switch network circuit and a capacitance measurement circuit. The switch network circuit is configured to electrically decouple the first capacitive element of the MEMS sensor from a first input of the IC and electrically couple the second capacitive element to a second input of the IC. The capacitance measurement circuit can be configured to measure capacitance of the second capacitive element of the MEMS sensor during application of a first electrical signal to the decoupled first capacitive element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.