Method for producing magneto-resistive effect element, magnetic sensor, rotation-angle detection device
US9488702B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 14, 2014 |
| Grant date | Nov 8, 2016 |
| Priority date | — |
| Expiry date | Jul 14, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N50/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A magnetic sensor includes a plurality of magneto-resistive effect elements each configured by using a magneto-resistive effect film formed by laminating a pinned layer, a nonmagnetic layer, and a free layer in order from a side of a substrate. A first linear pattern is formed in a first portion on the substrate in a first direction. A second linear pattern is formed in a second portion on the substrate in a second direction. A magnetization direction of the first portion is different from a magnetization direction of the second portion. The magneto-resistive effect film is further formed on the substrate. Each of the plurality of magneto-resistive effect elements includes a pair of electrodes formed by the magneto-resistive effect film processed into a predetermined shape.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.