Acoustic resonator comprising collar and frame
US9490771B2 · kind B2 · utility
6Cited by
116References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2013 |
| Grant date | Nov 8, 2016 |
| Priority date | — |
| Expiry date | Feb 23, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/54
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic resonator structure comprises a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer, a frame disposed within a main membrane region defined by an overlap between the first electrode, the piezoelectric layer, and the second electrode, and having an outer edge substantially aligned with a boundary of the main membrane region, and a collar formed separate from the frame, disposed outside the main membrane region, and having an inner edge substantially aligned with the boundary of or overlapping the main membrane region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.