On-chip alkali dispenser
US9491802B2 · kind B2 · utility
2Cited by
4References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 11, 2013 |
| Grant date | Nov 8, 2016 |
| Priority date | — |
| Expiry date | Jan 30, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG04F5/14
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Embodiments described herein provide for an on-chip alkali dispenser. The on-chip alkali dispenser includes a monolithic semiconductor substrate defining a trench therein, and an evaporable metal material disposed in the trench. A heating element is disposed proximate the evaporable metal material and configured to provide heat to the evaporable metal material. A getter material is disposed to sorb unwanted materials released from the evaporable metal material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.