Plasma generator using dielectric resonator
US9491841B2 · kind B2 · utility
6Cited by
4References
19Claims
0Family size
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Key dates
| Filing date | Mar 12, 2014 |
| Grant date | Nov 8, 2016 |
| Priority date | — |
| Expiry date | Mar 12, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E30/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A dielectric resonator is excited at its natural resonant frequency to produce highly uniform electric field for the generation of plasma. The plasma may be used optical or mass spectrometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.