Ultrasonic sensor for high temperature and manufacturing method thereof
US9494453B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 25, 2014 |
| Grant date | Nov 15, 2016 |
| Priority date | — |
| Expiry date | Mar 25, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/708
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is an ultrasonic sensor which includes a piezoelectric vibrator made of a lithium niobate (LN) single crystal and may be used in a high temperature region by generating a high ultrasonic wave output, and prevents cracks from being generated in the crystal. A piezoelectric vibrator 1 of the present invention has a surface (Y-axis 36° cut surface) obtained by rotating a surface orthogonal to a Y-axis of the LN crystal about an X-axis by 36°±2° as an output surface. The ultrasonic sensor further includes a retarder 3 made of titanium and a bonding layer 2 for bonding one surface of the retarder 3 to the output surface. The bonding layer 2 is made of silver and frit glass, and the frit glass has a coefficient of linear expansion ranging from 5×10−6 K−1 to 15×10−6 K−1.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.