Patent · US Active

Semiconductor device and method of fabricating the same

US9496381B2 · kind B2 · utility

6Cited by
16References
26Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 17, 2012
Grant dateNov 15, 2016
Priority date
Expiry dateDec 17, 2032

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10B12/485

Abstract

A semiconductor device may include a substrate including an active pattern delimited by a device isolation pattern, a gate electrode crossing the active pattern, a first impurity region and a second impurity region in the active pattern on both sides of the gate electrode, a bit line crossing the gate electrode, a first contact electrically connecting the first impurity region with the bit line, and a first nitride pattern on a lower side surface of the first contact. A width of the first contact measured perpendicular to an extending direction of the bit line may be substantially equal to that of the bit line.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.