Patent · US Active

Semiconductor device

US9496393B2 · kind B2 · utility

9Cited by
6References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 14, 2016
Grant dateNov 15, 2016
Priority date
Expiry dateJan 14, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/62
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device includes a semiconductor layer made of first conductivity type semiconductor layer; a second conductivity type well region formed on the semiconductor layer and having a channel region; a first conductivity type source region formed on the well region and including a first region adjacent to the well region and a second region adjacent to the first region; a gate insulating film formed on the semiconductor layer and having a first portion that contacts the first region; a second portion that contacts the well region and that has a thickness that is the same as that of the first portion; and a third portion that contacts the second region and that has a thickness that is greater than that of the first portion; and a gate electrode formed on the gate insulating film and opposed to the channel region where a channel is formed through the gate insulating film.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.