System for gas distribution and mass flow measurement
US9500505B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 2, 2015 |
| Grant date | Nov 22, 2016 |
| Priority date | — |
| Expiry date | May 29, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0635
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gas distribution system may include a gas mass flow sensor with a resistive element configured to be heated, a thermally conductive shell surrounding the resistive element and heat-transfer control elements. The shell may include a leading surface oriented substantially orthogonal to a direction of gas flow. The heat-transfer control elements may be positioned to focus heat transfer from the resistive element through the leading surface of the shell so that a rate of heat transfer is independent from the variations in flow configuration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.