Dielectric metasurface optical elements

US9507064B2 · kind B2 · utility

Assignees

• The Board of Trustees of the Leland Stanford Junior University · US
• Technion Research & Development Foundation Limited · IL

Inventors

• Mark L. Brongersma · Stanford, US
• Dianmin Lin · Los Altos, US
• Pengyu Fan · Stanford, US
• Erez Hasman · Hadera, IL

Key dates

• Filing date: Jul 27, 2015
• Grant date: Nov 29, 2016
• Expiry date: Jul 27, 2035

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B82Y20/00
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A dielectric gradient metasurface optical device provides optical wavefront shaping using an ultrathin (less than 100 nm thick) layer of nanoscale geometric Pancharatnam-Berry phase optical elements deposited on a substrate layer. The optical elements are nanobeams composed of high refractive index dielectric material. The nanobeams have uniform size and shape and are arranged with less than 200 nm separations and spatially varying orientations in the plane of the device such that the optical device has a spatially varying optical phase response capable of optical wavefront shaping. The high refractive index dielectric material may be materials compatible with semiconductor electronic fabrication, including silicon, polysilicon, germanium, gallium arsenide, titanium dioxide, or iron oxide.