System and method for reducing flow perturbations and improving the accuracy of a rate of decay measurement in a mass flow controller
US9507351B2 · kind B2 · utility
1Cited by
7References
17Claims
0Family size
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Key dates
| Filing date | Mar 4, 2013 |
| Grant date | Nov 29, 2016 |
| Priority date | — |
| Expiry date | May 7, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A mass flow controller includes a fluid inlet, a fluid outlet, and a conduit defining a flow path along which the fluid flows through the mass flow controller. The mass flow controller includes an inlet block having an inlet aperture, an inlet channel fluidly coupled to the conduit, and one or more restrictors positioned along the flow path between the inlet aperture and inlet channel to minimize flow perturbations when a rate of decay measurement is taken or when flow the amount of pressure supplied to the valve inlet is otherwise interrupted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.