Apparatus for focusing a laser beam and method for monitoring a laser processing operation
US9511450B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 11, 2013 |
| Grant date | Dec 6, 2016 |
| Priority date | — |
| Expiry date | Sep 22, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J1/4257
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus for focusing a laser beam on a workpiece includes at least one transmissive optical element which is arranged at a tilting angle with respect to a plane perpendicular to a beam axis of the laser beam, the transmissive optical element comprising a first side and a second side through which the laser beam passes, a spatially-resolving detector configured to detect laser radiation reflected from the transmissive optical element, and an image evaluation device coupled to the detector, the image evaluation device configured to distinguish laser radiation reflected from the first side of the optical element from laser radiation reflected from the second side of the optical element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.